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Axcelis

NV GSD 100

Ion ImplantationAxcelis NV GSD 100 family
Research Quality: 30% complete
NV GSD 100 — Inventory photo
Fig. 01NV GSD 100Inventory photo[1]

Power

3 Phase[1]

Gas delivery

SDS Gas Box[1]

What is it?

The Axcelis NV GSD 100 is an ion implanter with 3-phase input, 208 V input, 160 kV output, 50 kVA power, 15 mA current, and features including Electron Shower, direct drive, Cell V6, Solaris, and SDS Gas Box.

What do the numbers mean?

Power & electrical2

Phase
3 Phase[1]
Accurate?
Input
208 V[1]
Accurate?

Gas & chemistry1

SDS Gas Box[1]
Accurate?

Configuration & options7

Output
160 KV[1]
Accurate?
Power
50 KVA[1]
Accurate?
Current
15 MA[1]
Accurate?
Electron Shower[1]
Accurate?
Direct drive[1]
Accurate?
Cell V6[1]
Accurate?
Solaris[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Input208 V[1]
  • ConfigurationSDS Gas Box[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the NV GSD 100 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV GSD 100 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NV GSD 100 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NV GSD 100 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NV GSD 100 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NV GSD 100 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Jul 29, 2026.

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