Waferpedia

Tool family

Axcelis NV GSD 100

AxcelisIon Implantation1 entry

Axcelis NV GSD 100 Implanter.

LinkedIn X Email

Models in this family

  1. NV GSD 100

    The Axcelis NV GSD 100 is an ion implanter with 3-phase input, 208 V input, 160 kV output, 50 kVA power, 15 mA current, and features including Electron Shower, direct drive, Cell V6, Solaris, and SDS Gas Box.