Comparison ledger
Axcelis 200 PCU, Axcelis NV GSD A 80, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | NV GSD A 80Axcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis NV GSD A 80 |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | 50 Hz[5] |
| Phase | 3 Phase[3] | 3 Phase[4] |
| Voltage | 400 V[3] | 200 V[5] |
| Power | — | 30 KVA[4] |
| Gas | — | BF3, ASH3, AR[4] |
| Configuration | — | Pumps:[4] |
| P1 | — | Turbo Pump Mitsubishi PT 1500[4] |
| P2 | — | Cyro Pump Suzuki-Syokan A200[4] |
| P3 | — | Cryo Pump Suzuki-Syokan A300[4] |
| RP1 | — | Dry Pump Ebara A07V[4] |
| RP2 | — | Dry Pump Ebara A30V[4] |
| RP3 | — | Alcatel Drytel34[4] |
| Manufacturer | — | Axcelis[4] |
| Model | — | NV GSD A 80[4] |
| Equipment type | — | Ion implanter[6] |
| Wafer size | — | 8 inch[4] |
| Power rating | — | 30 KVA[4] |
| Gas delivery | — | BF3, ASH3, AR[4] |
| Pump P1 | — | Turbo Pump Mitsubishi PT 1500[4] |
| Pump P2 | — | Cyro Pump Suzuki-Syokan A200[4] |
| Pump P3 | — | Cryo Pump Suzuki-Syokan A300[4] |
| Pump RP1 | — | Dry Pump Ebara A07V[4] |
| Pump RP2 | — | Dry Pump Ebara A30V[4] |
| Pump RP3 | — | Alcatel Drytel34[4] |
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