Comparison ledger
Axcelis 200 PCU, Nissin Exceed 2000 A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | Exceed 2000 ANissin |
|---|---|---|
| OEM | Axcelis | Nissin |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Nissin Exceed 2000 |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | — |
| Gas | — | Ar, Arsenic, BF3, PH3[4] |
| SO | — | Win 2000 Japan[4] |
| Configuration | — | Missing:[4] |
| OS | — | JDOS[5] |
| Category | — | Ion Implantation[6] |
| Wafer size | — | 8-inch wafers[7] |
| Gas delivery | — | Ar, Arsenic, BF3, PH3[6] |
| Missing items | — | turbo, dry pump, bsm power supply, all mfcs[5] |
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