Comparison ledger
Axcelis NV GSD 100, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NV GSD 100Axcelis | 160 XP IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 100 | Varian 160 XP Ion |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Input | 208 V[1] | — |
| Output | 160 KV[1] | — |
| Power | 50 KVA[1] | — |
| Current | 15 MA[1] | — |
| Configuration | Electron Shower[1] | 150mm High Current IMP[4] |
| Type | Ion implanter[2] | — |
| Input voltage | 208 V[1] | — |
| Electron shower | Present[3] | — |
| Drive | Direct drive[3] | — |
| Cell | Cell V6[1] | — |
| Control/software | Solaris[3] | — |
| Gas box | SDS Gas Box[3] | — |
| OEM | — | Varian[5] |
| Model | — | 160 XP Ion[5] |
| Category | — | Ion Implantation[4] |
| Tool type | — | ion implanter[4] |
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