Waferpedia

Comparison ledger

101-149-053 Gold Boosterversus850 LT

Branson 101-149-053 Gold Booster, EV Group 850 LT, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
850 LTEV Group
OEMBransonEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—Wafer ID Reader
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBranson 101-149-053 Gold BoosterEV Group 850
Cited variants—
Specifications
Configuration1:1.5[2]Basic Unit[5]
ManufacturerBranson[3]—
Model101-149-053[3]850 LT[6]
TypeGold Booster[3]—
Operating frequency20 kHz[4]—
Gain1:1.5[3]—
Mounting thread1/2-20[4]—
Length5.4 in[4]—
Gain ratio1:1.5[3]—
Software—EVG CIMFramework (without license)[5]
Wafer size—Wafer ID Reader[5]
OEM—EV Group[6]
Wafer sizes—8 inch[5]
System type—Automated SOI / Direct Wafer Bonding System[1]
Application focus—SOI substrate manufacturing[1]
Process steps combined—Cleaning, alignment, pre-bonding, and IR-inspection[1]
Production mode—High volume production[1]
Maximum wafer size stated—Up to 300 mm wafers[1]
Thickness—300 μm - 800 μm[5]
Category—Packaging & Bonding[6]
Automation—Fully-automatic[7]
Wafer size capability—Up to 300 mm wafers[1]
Wafer setup thickness—300 μm - 800 μm[5]
Wafer ID Reader—Included[5]
LowTemp plasma activation—Used[1]
Cleaning module—One Cleaning Module[7]
Spinner chuck—One Spinner Chuck for 8”/200mm wafers[7]
DI water dispense line—One DI Water Dispense Line[7]
LowTemp plasma activation module—One LowTemp Plasma Activation Module[7]
Control interface—PC controlled with Windows based graphical user interface[7]
Access control—Password protected access levels[7]
High frequency RF generator—With matching unit[7]
Low frequency RF generator—With matching unit[7]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]nextdayautomation.comnextdayautomation.com
  5. [5]inventory listing
  6. [6]waferpedia.comwaferpedia.com
  7. [7]waferpedia.comwaferpedia.com