Waferpedia

Comparison ledger

11 Bake Plateversus1000 Hot Plate

Brewer Science 11 Bake Plate, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
11 Bake PlateBrewer Science
OEMBrewer ScienceCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrewer Science 11 Bake PlateCEE 1000 Hot Plate
Specifications
P/N901696[1]—
ManufacturerBrewer Science[1]—
Model11[1]—
Machine Weight150 lb[2]—
Shipping Weight280 lb[2]—
Cabinet Dimensions28.25 in L x 28.25 in W x 9.5 in H[2]—
Temperature Resolution0.1°C[2]—
Temperature Rangeambient to 200°C (250°C optional)[2]—
Temperature Uniformity± 0.3% across working surface[2]—
Power Requirements208 to 240 volts AC, 2351-3130 watts[2]—
Full Load Current12.5 to 15.5 amps[2]—
Input Breaker/Fuse20 amps[2]—
Substrate Sizes< 1 cm to 450-mm round; 20 in x 20 in square[2]—
MakeBrewer Science[1]—
DisplayDual 4-digit alphanumeric LED display[2]—
ControlFull PID operation[2]—
Temperature auto-tuningCapable[2]—
SecurityPassword protection option at no charge[2]—
Ramping capabilityOptional; 8 specific set points[2]—
Lift pinsPneumatic lift pins (load/unload) standard[2]—
StandoffsRemovable fixed proximity standoffs (0.006 in standard)[2]—
Bake methodsContact or fixed proximity bake methods (standard)[2]—
Optional bake modesOptional vacuum and proximity bake for 300-mm and 450-mm wafers[2]—
Custom surfacesOptional custom bake plate surfaces available upon request[2]—
Optional exhausted lid port2-inch OD[2]—
Optional exhausted lid10- to 30-cfm range[2]—
Optional exhausted hoodAll stainless steel construction[2]—
Optional nitrogen purgeFor inert bake environment[2]—
Configuration—4"[3]
Type—Hot Plate[3]
Wafer Size—4 inch[3]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]brewerscience.combrewerscience.com
  3. [3]inventory listing