Comparison ledger
Canon FPA 3000 i 5 + Fine Pattern, SUSS MicroTec MA 150 CC Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MA 150 CC MaskSUSS MicroTec | |
|---|---|---|
| OEM | Canon | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | SUSS MicroTec MA 150 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Main 1:[2] | Topside Alignment[4] |
| Phase | 3 Phase[2] | — |
| Wafer sizes supported | 6 inch[3] | — |
| Power supply main 1 | 3 Phase - 3 Wire - 50/60 Hz[2] | — |
| Power supply main 2 | 1 Phase - 2 Wire - 50/60 Hz[2] | — |
| Vintage | 1997[2] | — |
| OEM | Canon[1] | SUSS MicroTec[5] |
| Model | FPA 3000 i 5 + Fine Pattern[1] | MA 150 CC[4] |
| Equipment type | Fine Pattern Aligner[3] | — |
| Wafer size | 6 inch[1] | — |
| Main 1 | 3 Phase - 3 Wire - 50/60 Hz[2] | — |
| Main 2 | 1 Phase - 2 Wire - 50/60 Hz[2] | — |
| Max Wafer Size | — | 6"/150mm Wafer Capable[4] |
| Make | — | SUSS[4] |
| Tool type | — | Mask Aligner[5] |
| Wafer sizes | — | 2, 3, 4, 5, 6 inch[4] |
| Topside alignment | — | Supported[4] |
| Operation mode | — | Automatic or manual mode[5] |
| Alignment | — | Automatic alignment[4] |
| Prealigner | — | Optical prealigner[5] |
| Lamp house | — | 1000 Watt lamphouse[4] |
| Optics | — | UV400 optics for 365nm and 405nm exposure[4] |
| Front lens | — | UV400 front lens[4] |
| Lamp power supply | — | Suss CIC 1000 Lamp Power Supply[4] |
| Microscope | — | Suss DVM 6 Microscope[4] |
| Camera | — | CCD camera right and left[4] |
| Contact exposure modes | — | Hard, soft, and vacuum contact exposure modes[4] |
| Display | — | Flat panel touchscreen[4] |
| Documentation | — | Operations manual[4] |
| Category | — | Lithography[5] |
| Wafer handling | — | Cassette to Cassette Operation[5] |
| Power | — | 1000 Watt Lamphouse[5] |
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