Comparison ledger
Cascade Microtech EPS150TRIAX, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EPS150TRIAXCascade Microtech | 1007KLA |
|---|---|---|
| OEM | Cascade Microtech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech EPS150TRIAX | KLA 1007 |
| Specifications | ||
| OEM | Cascade MicroTech[1] | — |
| Model | EPS150TRIAX[1] | 1007[4] |
| Equipment type | Probe Station[1] | Prober[5] |
| Enclosure | Light shield enclosure[1] | — |
| Measured quantities | Current, voltage, resistance, capacitance, conductance[1] | — |
| Capacitance and conductance measurement range | 20 Hz to 1 MHz[1] | — |
| Applications | I-V characterization; low current measurements; C-V characterization (at multiple frequencies); resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[1] | — |
| Microscope | Trinocular 6.7x stereo zoom microscope with 100x magnification[1] | — |
| Motion axes | Micropositioner movement in x, y, and z[1] | — |
| Probe station model | Cascade MicroTech EPS150TRIAX Probe Station[1] | — |
| Application | 150 mm manual probing solution for low-noise measurements[2] | — |
| Wafer size | 150 mm[3] | 150 mm[4] |
| Measurement capabilities | Current, voltage, resistance, capacitance and conductance[1] | — |
| Capacitance and conductance frequency range | 20 Hz to 1 MHz[1] | — |
| Triaxial chuck | Dedicated triaxial chuck with <± 5 μm planarity[3] | — |
| Chuck movement | Chuck X/Y movement with < 5 μm resolution[3] | — |
| Contact/separation stroke | Unique 200 μm platen contact/separation stroke[3] | — |
| Probe placement repeatability | 1 μm repeatability[3] | — |
| Probe tips | PTT probe tips with 7 μm tip radius[3] | — |
| Manufacturer | — | KLA[4] |
| Description | — | Wafer Prober[4] |
| Convertible to 8 inch wafer size | — | Yes[4] |
| Vintage | — | 01.06.1995[4] |
| Make | — | KLA[5] |
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