Comparison ledger
CEE 200 Spin, Lam Research Gasonics Gamma 2130 Photoresist Stripper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 SpinCEE | Gasonics Gamma 2130 Photoresist StripperLam Research |
|---|---|---|
| OEM | CEE | Lam Research |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 200 | Lam Research Gasonics |
| Specifications | ||
| Phase | 1 Phase[1] | — |
| Type | Spin Coater[1] | — |
| Model | 200[1] | Gamma 2130[3] |
| Make | CEE[1] | Lam / Novellus / Gasonics[3] |
| Wafer Sizes | 8 inch[1] | — |
| Configuration | 1 Phase[1] | System Configuration:[3] |
| Equipment type | Spin Coater[1] | Photoresist Stripper[3] |
| Spin speed | 5000 rpm[2] | — |
| Substrate support | Flat substrates up to 200 mm or fragments[2] | — |
| Substrate thickness max | 12 mm[2] | — |
| Coating thickness | Uniform coating thickness up to 100 µm[2] | — |
| Load Port | — | Brooks Fixload TM V6[3] |
| EFEM Robot | — | 02-169208-00[3] |
| Aligner | — | Yaskawa[3] |
| RF Rack | — | Generator ENI GHW-50A-04 5ea[3] |
| Light Curtain | — | Keyence[3] |
| EPD | — | 4ea(#2,#3,#4,#5 Port)[3] |
| RF Matcher | — | CPMX-3000 5ea[3] |
| RF Source | — | 02-352103-00 5ea[3] |
| HDIS Pedestal | — | #2, #3, #,1, #6[3] |
| Fixed Pedestal | — | #4, #5[3] |
| Stage #1 | — | Preheat[3] |
| Category | — | Resist Processing[5] |
| RF rack generator | — | ENI GHW-50A-04, 5ea[3] |
| Gate valve | — | MDC ISO Valve[3] |
| Throttle valve | — | NC[3] |
| Slit valve | — | V-TEX[3] |
| Manometer | — | MKS 10 Torr[3] |
| Gas box MFC #1 | — | Brooks O2[3] |
| Gas box MFC #2 | — | Brooks N2[3] |
| Gas box MFC #3 | — | Brooks H2N2[3] |
| Gas box MFC #4 | — | Brooks CF4[3] |
| Manometor | — | MKS 10 Torr[3] |
| Gas Box | — | MFC #1 Brooks O2, MFC #2 Brooks N2, MFC #3 Brooks H2N2, MFC #4 Brooks CF4[3] |
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