Lam Research

Gasonics Gamma 2130 Photoresist Stripper

Research Quality: 30% complete

What is it?

The Lam / Novellus / Gasonics Gamma 2130 is a photoresist stripper with source-described system and process chamber configurations.

What do the numbers mean?

Power & electrical5

RF Rack: Generator ENI GHW-50A-04 5ea^[1]; Signal Cable (RF Cable Included)Process Chamber Configuration:^[1]
RF Matcher: CPMX-3000 5ea^[1]
RF Source: 02-352103-00 5ea^[1]; Signal Cable (RF Cable Included) Process Chamber Configuration:^[2]

Wafer handling1

EFEM Robot: 02-169208-00^[1]

Control & software2

Athenta Computer^[1]

Accurate?

UI Computer^[1]

Accurate?

Configuration & options14

System Configuration:^[1]; Main System^[1]
Load Port: Brooks Fixload TM V6^[1]
Aligner: Yaskawa^[1]; UI Panel^[1]
Light Curtain: Keyence^[1]; GXT type (Upgrade Bell jar and Quartz tube)^[1]
EPD: 4ea(#2,#3,#4,#5 Port)^[1]; Load/Unload Port^[1]
HDIS Pedestal: #2, #3, #,1, #6^[1]
Fixed Pedestal: #4, #5^[1]
Stage #1: Preheat^[1]; Yaskawa Spindle^[1]; Express type (upgrade Bell jar and Quartz tube)^[2]

Interested in this tool?

Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RF RackGenerator ENI GHW-50A-04 5ea^[1]
ConfigurationSignal Cable (RF Cable Included)Process Chamber Configuration:^[1]
RF MatcherCPMX-3000 5ea^[1]
RF Source02-352103-00 5ea^[1]
ConfigurationSignal Cable (RF Cable Included) Process Chamber Configuration:^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Gasonics Gamma 2130 Photoresist Stripper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics Gamma 2130 Photoresist Stripper are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics Gamma 2130 Photoresist Stripper are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics Gamma 2130 Photoresist Stripper are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics Gamma 2130 Photoresist Stripper are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics Gamma 2130 Photoresist Stripper is not on record.
Answerable by: an OEM datasheet or a fab qualification report