Comparison ledger
Denton Vacuum 635 and Denton Vacuum Discovery 18, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 635Denton Vacuum | Discovery 18Denton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | 8" | 6-inch diameter stage |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum 635 | Denton Vacuum Discovery |
| Specifications | ||
| OEM | Denton Vacuum[1] | — |
| Model | 635[1] | — |
| Tool type | Deposition[2] | — |
| Process capabilities | Four confocal cathodes, inclined 25 degrees off vertical[1] | — |
| Standard targets | 4" Au, 4" Cr, 3" Pt, 3" Ti[1] | — |
| Film thickness range | From a few nm to hundreds of nm[1] | From a few nm to hundreds of nm[3] |
| Sputter power supplies | DC1 pulse or DC, DC2, RF1[1] | — |
| Cathode switching | Switch-control any supply to any cathode[1] | — |
| Co-sputter capability | Yes[1] | Yes[3] |
| Substrate pre-clean | RF2 supply[1] | — |
| Reactive sputtering | Nitrogen or oxygen[1] | Available with nitrogen or oxygen[3] |
| Stage diameter | 8 inch[1] | 6-inch diameter stage[3] |
| Substrate rotation | +/- 5% uniformity[1] | — |
| Chamber base pressure | 2 x 10^-7 Torr in 12 hours[1] | — |
| Substrate heating | Up to 500 C[1] | Up to 200 C[3] |
| Liftoff deposition | With water-cooled stage[1] | Available with sputter power[3] |
| Argon pressure range | < 1-90 mT[1] | 3-15 mT controllable with 200 sccm MFC controller[3] |
| APC / MFC controller | 100 sccm MFC controller[1] | — |
| Deposition type | — | Sputter deposition of metals, alloys, and insulating thin films[3] |
| Cathodes | — | Three 3-inch diameter confocal cathodes[3] |
| RF power supplies | — | 2 RF power supplies[3] |
| DC power supply | — | Switchable DC power supply[3] |
| Substrate rotation uniformity | — | +/- 10%[3] |
| Pump system | — | Cryo and turbo pumped[3] |
| Base pressure | — | 1 x 10^7 Torr[3] |
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