Denton Vacuum

Discovery 18

Deposition 6-inch diameter stage Denton Vacuum Discovery family

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Discovery 18 — nanofab.utah.edu — Fig. 01Discovery 18nanofab.utah.edu^[1]

Plate 01Discovery 18 DC
Utah NanofabWatch on YouTube

Wafer size

6-inch diameter stage

Power

2 RF power supplies^[1]

Vacuum

Cryo and turbo pumped^[1]

Optics

From a few nm to hundreds of nm^[1]

What is it?

The Denton Discovery 18 at Utah Nanofab is described as a sputter deposition tool for metals, alloys, and insulating thin films. The source states that it supports film thicknesses from a few nanometers to hundreds of nanometers, has three 3-inch diameter confocal cathodes, RF and DC power supplies, co-sputter capability, reactive sputtering with nitrogen or oxygen, and a 6-inch diameter stage.

What can it run?

Process applications and technology nodes documented for this tool.

Sputter deposition of metals
Sputter deposition of alloys
Sputter deposition of insulating thin films

What do the numbers mean?

Power & electrical2

RF power supplies: 2 RF power supplies^[1]
DC power supply: Switchable DC power supply^[1]

Vacuum & pumping3

Pump system: Cryo and turbo pumped^[1]
Base pressure: 1 x 10^7 Torr^[1]
Argon pressure range: 3-15 mT controllable with 200 sccm MFC controller^[1]

Wafer handling2

Substrate rotation uniformity: +/- 10%^[1]
Substrate heating: Up to 200 C^[1]

Optics & imaging1

Film thickness range: From a few nm to hundreds of nm^[1]

Configuration & options6

Deposition type: Sputter deposition of metals, alloys, and insulating thin films^[1]
Cathodes: Three 3-inch diameter confocal cathodes^[1]
Co-sputter capability: Yes^[1]
Reactive sputtering: Available with nitrogen or oxygen^[1]
Stage diameter: 6-inch diameter stage^[1]
Liftoff deposition: Available with sputter power^[1]

Interested in this tool?

Embed spec card

What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

MKS 660— Same function class: Deposition, 6-inch diameter stageCompare in depthsource^[1]

siblingDenton Vacuum 635— Listed on the same equipment page under deposition alongside Denton 635.source^[2]
siblingDenton Vacuum 635LL— Listed alongside the 635LL in the sputtering section as another Denton sputtering tool.source^[3]

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

RF power supplies2 RF power supplies^[1]
DC power supplySwitchable DC power supply^[1]
Pump systemCryo and turbo pumped^[1]
Base pressure1 x 10^7 Torr^[1]
Argon pressure range3-15 mT controllable with 200 sccm MFC controller^[1]

Where are the manuals?

Publicly hosted documents referencing this tool, linked at their original location. Hosted by the linked institutions — availability may change.

Denton Discovery 18 SOPSOPutah.edu

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the Discovery 18 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Discovery 18 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Discovery 18 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Discovery 18 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Discovery 18 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Discovery 18 is not on record.
Answerable by: an OEM datasheet or a fab qualification report