Comparison ledger
Denton Vacuum Discovery 18 and MKS 660, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | Discovery 18Denton Vacuum | 660MKS |
|---|---|---|
| OEM | Denton Vacuum | MKS |
| Category | Deposition | Deposition |
| Wafer size | 6-inch diameter stage | 6-inch diameter stage |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum Discovery | MKS 660 |
| Specifications | ||
| Deposition type | Sputter deposition of metals, alloys, and insulating thin films[1] | — |
| Film thickness range | From a few nm to hundreds of nm[1] | — |
| Cathodes | Three 3-inch diameter confocal cathodes[1] | — |
| RF power supplies | 2 RF power supplies[1] | — |
| DC power supply | Switchable DC power supply[1] | switchable DC power supply[2] |
| Co-sputter capability | Yes[1] | — |
| Reactive sputtering | Available with nitrogen or oxygen[1] | — |
| Stage diameter | 6-inch diameter stage[1] | — |
| Substrate rotation uniformity | +/- 10%[1] | — |
| Pump system | Cryo and turbo pumped[1] | — |
| Base pressure | 1 x 10^7 Torr[1] | — |
| Substrate heating | Up to 200 C[1] | — |
| Liftoff deposition | Available with sputter power[1] | — |
| Argon pressure range | 3-15 mT controllable with 200 sccm MFC controller[1] | — |
| process | — | sputter deposition of metals, alloys, and insulating thin films[2] |
| film thickness range | — | from a few nm to hundreds of nm[2] |
| cathodes | — | three 3-inch diameter confocal cathodes[2] |
| power supplies | — | 2 RF power supplies[2] |
| co-sputter capability | — | yes[2] |
| reactive sputtering | — | available (Nitrogen or Oxygen)[2] |
| stage | — | 6-inch diameter stage[2] |
| substrate rotation | — | +/- 10% uniformity[2] |
| vacuum system | — | cryo and turbo pumped to 1 x 10^7 Torr[2] |
| substrate heating | — | up to 200 C[2] |
| liftoff deposition | — | with sputter power[2] |
| argon pressure range | — | 3-15 mT controllable with 200 sccm MFC controller[2] |
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