Waferpedia

Comparison ledger

DV 502 A Vacuum versus Explorer 14

Denton Vacuum DV 502 A Vacuum and Denton Vacuum Explorer 14, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
DV 502 A VacuumDenton Vacuum
Explorer 14Denton Vacuum
OEMDenton VacuumDenton Vacuum
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDenton Vacuum DV 502 A VacuumDenton Vacuum Explorer 14
Specifications
Configuration12” diameter x 12” H bell jar with implosion guard[1]2 RF Cathodes, RF Plasma Clean[2]
Chamber—14"x 14"[2]
DV 502 A Vacuum entryExplorer 14 entry

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing