Comparison ledger
Denton Vacuum DV 502 A Vacuum and Denton Vacuum SJ20C/Material, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | DV 502 A VacuumDenton Vacuum | SJ20C/MaterialDenton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Denton Vacuum DV 502 A Vacuum | Denton Vacuum SJ20C/Material |
| Specifications | ||
| Configuration | 12” diameter x 12” H bell jar with implosion guard[1] | — |
| Tool owner | — | Jim Pierce[2] |
| Serial number | — | 18097[2] |
| Tool description | — | Film thickness monitor/deposition controller[2] |
| Process | — | E-beam evaporation[2] |
| Evaporation materials available | — | Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, W[2] |
| Crucible liners | — | Poco Graphite crucible liners (large and small); Cu crucible liners[2] |
| SOP | — | Denton SJ20C SOP[2] |
| Process Type | — | E-beam evaporation[2] |
| Deposition Method | — | Physical Vapor Deposition (PVD)[2] |
| Number of Source Hearth Positions | — | 4[2] |
| Film Thickness Monitor/Deposition Controller | — | Present[2] |
| Crucible Liner Types | — | Poco Graphite (large & small), Cu[2] |
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