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Comparison ledger

DAD321 versus DAG810

Disco DAD321 and Disco DAG810, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD321Disco
DAG810Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size100mm4"
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD321Disco DAG810
Specifications
Machine typeAutomatic dicing saw[1]
Wafer size100 mm, 150 mm[1]
Supported wafer materialsSilicon, glass and pyrex wafers[1]
Other materialsOther materials on demand[1]
Maximum thickness on silicon1 mm[1]
Maximum thickness on glass and pyrex2.4 mm[1]
Max wafer size6 inches[2]
Wafer typeAll shapes and sizes[2]
Max wafer thickness2 mm[2]
Max blade speed30,000 rpm[2]
Max feed speed2 mm/sec[2]
Tape thickness70 μm[2]
Equipment typecompact, automatic grinder[3]
Materialssilicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[3]
Wafer sizes supported by universal vacuum chuck table4", 5", 6", and 8"[3]
Mechanical frame usefor UV-tape mounted wafers or chips[3]
Spindlehigh-rigidity, low-vibration spindle[3]
Grinding wheelsdedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[3]
Probe-heightreal-time probe-height from 4" wafer size[3]
User interfaceLCD touch screen[3]
Grinding speedas high as 30 microns/min[3]
Thickness variationtotal thickness variation close to one micron[3]
Surface roughnessless than 100 nm[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]ncf.uic.eduncf.uic.edu
  3. [3]epfl.chepfl.ch