Waferpedia

Comparison ledger

DAD321 versus DFL 7560 L

Disco DAD321 and Disco DFL 7560 L, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD321Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size100mmRobot Wafer handling
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD321Disco DFL
Cited variants
  • 200mm Fully Automatic wafer handling from/to standard wafer cassette[1]
Specifications
Machine typeAutomatic dicing saw[2]
Wafer size100 mm, 150 mm[2]Robot Wafer handling[1]
Supported wafer materialsSilicon, glass and pyrex wafers[2]
Other materialsOther materials on demand[2]
Maximum thickness on silicon1 mm[2]
Maximum thickness on glass and pyrex2.4 mm[2]
Max wafer size6 inches[3]
Wafer typeAll shapes and sizes[3]
Max wafer thickness2 mm[3]
Max blade speed30,000 rpm[3]
Max feed speed2 mm/sec[3]
Tape thickness70 μm[3]
WaferCan be modified at later date to 3”, 4” & 6” wafers and frame[1]
ConfigurationOperation by touch panel LCD monitor[1]
Uninterruptible Power Supply1[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]epfl.chepfl.ch
  3. [3]ncf.uic.eduncf.uic.edu