Waferpedia

Comparison ledger

DAD321 versus Z09

Disco DAD321 and Disco Z09, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD321Disco
Z09Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size100mmup to Φ8” workpieces
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD321Disco Z09
Specifications
Machine typeAutomatic dicing saw[1]
Wafer size100 mm, 150 mm[1]
Supported wafer materialsSilicon, glass and pyrex wafers[1]
Other materialsOther materials on demand[1]
Maximum thickness on silicon1 mm[1]
Maximum thickness on glass and pyrex2.4 mm[1]
Max wafer size6 inches[2]
Wafer typeAll shapes and sizes[2]
Max wafer thickness2 mm[2]
Max blade speed30,000 rpm[2]
Max feed speed2 mm/sec[2]
Tape thickness70 μm[2]
ModelDAD3241[3]
Max. workpiece sizeΦ8”[3]
X-/Y-axis cutting range210 mm[3]
Cutting speed0.1-800 mm/s[3]
Index positioning accuracy0.002/210 mm[3]
Z-axis max. stroke32.2 mm[3]
Moving resolution0.000002 mm[3]
Repeatability accuracy0.001 mm[3]
Θ-axis max. rotating angle320°[3]
Rotation speed range6,000-60,000 rpm[3]
Spindle power1.8 kW[3]
Control interfacePC and touch screen via a specialized interface system[3]
Built-in microscopeYes[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]ncf.uic.eduncf.uic.edu
  3. [3]aggiefab.tamu.eduaggiefab.tamu.edu