Waferpedia

Comparison ledger

DAD641 versus DFL 7560 L

Disco DAD641 and Disco DFL 7560 L, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAD641Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeRobot Wafer handling
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAD641Disco DFL
Cited variants
  • 200mm Fully Automatic wafer handling from/to standard wafer cassette[1]
Specifications
Tool typeDicing saw[2]
LocationBackend Lab[2]
Tool nameDisco DAD641[3]
Wafer sizeRobot Wafer handling[1]
WaferCan be modified at later date to 3”, 4” & 6” wafers and frame[1]
ConfigurationOperation by touch panel LCD monitor[1]
Uninterruptible Power Supply1[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]nanofab.utah.edunanofab.utah.edu
  3. [3]nanofab.utah.edunanofab.utah.edu