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Comparison ledger

DAG810 versus R07

Disco DAG810 and Disco R07, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAG810Disco
R07Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size4"up to Φ8”
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAG810Disco R07
Cited variants
  • R07-SDC600-BB101-75[1]
  • R07-SD400-BB200-75[1]
  • R07-SDC400-BB300-75[1]
  • R07-SDC400-BB500-75[1]
Specifications
Equipment typecompact, automatic grinder[2]
Materialssilicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[2]
Wafer sizes supported by universal vacuum chuck table4", 5", 6", and 8"[2]
Mechanical frame usefor UV-tape mounted wafers or chips[2]
Spindlehigh-rigidity, low-vibration spindle[2]
Grinding wheelsdedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[2]
Probe-heightreal-time probe-height from 4" wafer size[2]
User interfaceLCD touch screen[2]
Grinding speedas high as 30 microns/min[2]
Thickness variationtotal thickness variation close to one micron[2]
Surface roughnessless than 100 nm[2]
ModelDAD3241[3]
Max. workpiece sizeΦ8”[3]
X-/Y-axis cutting range210 mm[3]
Cutting speed0.1-800 mm/s[3]
Index positioning accuracy0.002/210 mm[3]
Z-axis max. stroke32.2 mm[3]
Moving resolution0.000002 mm[3]
Repeatability accuracy0.001 mm[3]
Θ-axis max. rotating angle320°[3]
Rotation speed range6,000-60,000 rpm[3]
Spindle power1.8 kW[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]disco.co.jpdisco.co.jp
  2. [2]epfl.chepfl.ch
  3. [3]aggiefab.tamu.eduaggiefab.tamu.edu