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Comparison ledger

DAG810 versus Z09

Disco DAG810 and Disco Z09, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DAG810Disco
Z09Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer size4"up to Φ8” workpieces
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DAG810Disco Z09
Specifications
Equipment typecompact, automatic grinder[1]
Materialssilicon, III/V materials (GaN, GaAs, InP), and various glass types (pure amorphous SiO2, float glass, pyrex)[1]
Wafer sizes supported by universal vacuum chuck table4", 5", 6", and 8"[1]
Mechanical frame usefor UV-tape mounted wafers or chips[1]
Spindlehigh-rigidity, low-vibration spindle[1]
Grinding wheelsdedicated wheels for coarse and fine silicon grinding, coarse and fine glass grinding, and GaN fine grinding[1]
Probe-heightreal-time probe-height from 4" wafer size[1]
User interfaceLCD touch screen[1]
Grinding speedas high as 30 microns/min[1]
Thickness variationtotal thickness variation close to one micron[1]
Surface roughnessless than 100 nm[1]
ModelDAD3241[2]
Max. workpiece sizeΦ8”[2]
X-/Y-axis cutting range210 mm[2]
Cutting speed0.1-800 mm/s[2]
Index positioning accuracy0.002/210 mm[2]
Z-axis max. stroke32.2 mm[2]
Moving resolution0.000002 mm[2]
Repeatability accuracy0.001 mm[2]
Θ-axis max. rotating angle320°[2]
Rotation speed range6,000-60,000 rpm[2]
Spindle power1.8 kW[2]
Control interfacePC and touch screen via a specialized interface system[2]
Built-in microscopeYes[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]aggiefab.tamu.eduaggiefab.tamu.edu