Waferpedia

Comparison ledger

DFL 7560 L versus R07

Disco DFL 7560 L and Disco R07, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
R07Disco
OEMDiscoDisco
CategoryDicing & GrindingDicing & Grinding
Wafer sizeRobot Wafer handlingup to Φ8”
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DFLDisco R07
Cited variants
  • 200mm Fully Automatic wafer handling from/to standard wafer cassette[1]
  • R07-SDC600-BB101-75[2]
  • R07-SD400-BB200-75[2]
  • R07-SDC400-BB300-75[2]
  • R07-SDC400-BB500-75[2]
Specifications
Wafer sizeRobot Wafer handling[1]
WaferCan be modified at later date to 3”, 4” & 6” wafers and frame[1]
ConfigurationOperation by touch panel LCD monitor[1]
Uninterruptible Power Supply1[1]
ModelDAD3241[3]
Max. workpiece sizeΦ8”[3]
X-/Y-axis cutting range210 mm[3]
Cutting speed0.1-800 mm/s[3]
Index positioning accuracy0.002/210 mm[3]
Z-axis max. stroke32.2 mm[3]
Moving resolution0.000002 mm[3]
Repeatability accuracy0.001 mm[3]
Θ-axis max. rotating angle320°[3]
Rotation speed range6,000-60,000 rpm[3]
Spindle power1.8 kW[3]

Plan your fab

Building a Dicing & Grinding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]disco.co.jpdisco.co.jp
  3. [3]aggiefab.tamu.eduaggiefab.tamu.edu