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Comparison ledger

DFL7340 versus DFL7340-stealth-dicer

Disco DFL7340 and Disco DFL7340-stealth-dicer, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
DFL7340Disco
OEMDiscoDisco
CategoryPackaging & BondingPackaging & Bonding
Wafer size200mm200mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyDisco DFL7340Disco DFL7340-stealth-dicer
Specifications
ModelDFL7340[1]DFL7340[1]
OEMDisco[1]Disco[1]
Process areaPackaging[1]Packaging[1]
Compatible materialsSi wafers only[1]Dedicated to dicing Si wafers only[1]
Stealth dicing engineSDE03 engine with λ = 1342 nm[1]
Maximum sample diameter200 mm[1]200 mm[1]
Dicing orientationTopside or backside (through tape) dicing possible[1]Topside or backside (through tape) dicing possible[1]
Laser engine wavelengthλ = 1342 nm[1]
Si resistivity requirementρ > 0.01 Ω•cm[1]
Surface roughness requirementDicing streets must be smooth (mirror polish) on the surface where the laser is incident[1]
Street clearance requirementWafer must be metal-free in a width 0.4 × substrate thickness, centred on the dicing street[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca