Waferpedia

Disco

DFL7340

Packaging & Bonding200mmDisco DFL7340 family
Research Quality: 40% complete
DFL7340 — confluence.nanofab.ualberta.ca
Fig. 01DFL7340confluence.nanofab.ualberta.ca[1]

Wafer size

200mm

Optics

SDE03 engine with λ = 1342 nm[1]

What is it?

The Disco DFL7340 stealth dicing system is listed as a packaging tool for dicing silicon wafers. The source states it uses an SDE03 stealth dicing engine dedicated to Si wafers only, and that it can perform topside or backside (through tape) dicing, with a maximum sample diameter of 200 mm.

What can it run?

Process applications and technology nodes documented for this tool.

  • Dicing silicon wafers
  • Stealth dicing of Si substrates

What do the numbers mean?

Wafer handling1

Compatible materials
Si wafers only[1]
Accurate?

Optics & imaging1

Stealth dicing engine
SDE03 engine with λ = 1342 nm[1]
Accurate?

Configuration & options5

Model
DFL7340[1]
Accurate?
OEM
Disco[1]
Accurate?
Process area
Packaging[1]
Accurate?
Maximum sample diameter
200 mm[1]
Accurate?
Dicing orientation
Topside or backside (through tape) dicing possible[1]
Accurate?
Interested in this tool?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the DFL7340 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFL7340 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the DFL7340 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the DFL7340 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the DFL7340 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the DFL7340 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]confluence.nanofab.ualberta.caconfluence.nanofab.ualberta.caconfluence.nanofab.ualberta.ca
  2. [2]https://www.nanofab.ualberta.ca/category/fabrication/nanofab.ualberta.cananofab.ualberta.ca
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Last updated Jul 29, 2026.

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