Comparison ledger
Filmetrics F50 and Filmetrics F50-UV, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | F50Filmetrics | F50-UVFilmetrics |
|---|---|---|
| OEM | Filmetrics | Filmetrics |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 150mm | 8" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics F50 | Filmetrics F50-UV |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | Filmetrics[2] | — |
| Model | F50-UV[2] | Filmetrics F50-UV[3] |
| Tool Type | Inspection, Test and Characterization[2] | — |
| Description | Thin-Film Reflectometry[2] | — |
| Reflection spectrum range | 190-1100 nm[2] | — |
| Light sources | Deuterium (UV) and Halogen (Vis-nIR)[2] | — |
| Thickness / optical constants range | 10 Å to 150 µm thickness, n, and k measurements[2] | — |
| Wafer mapping size | Motorized mapping on wafers up to 150 mm[2] | — |
| Small substrate size | ≥ 2-3 mm[2] | — |
| Measurement spot size | Approx. 1-2 mm[2] | — |
| Measurement capability | Can model up to three layers with accuracy[2] | — |
| Measurement modes | Motorized wafer-mapping or non-motorized single-spot measurements[2] | — |
| Maximum sample size | Samples as large as 300 mm in diameter[1] | — |
| Stage type | Motorized R-Theta stage[1] | — |
| Mapping speed | As quickly as two points per second[1] | — |
| Computer interface | USB port connection to a Windows computer[1] | — |
| Vendor | — | Filmetrics[3] |
| Measurement method | — | spectroscopic reflectometry[4] |
| Function | — | thin-film thickness and optical characteristics measurement[3] |
| Automated stage | — | yes[3] |
| Sample size | — | up to 8 inches in diameter[3] |
| Substrate size | — | ~5 mm × 5 mm to 200 mm diameter[4] |
| Thickness measurement range | — | 5 nm – 40 µm[4] |
| Minimum thickness to measure n and k | — | 50 nm[4] |
| Wavelength range | — | 190–1100 nm[4] |
| Spot size | — | 1.5 mm[4] |
| Light source | — | deuterium + tungsten-halogen (dual light source; may choose one or both lamps)[4] |
| Measurement results visualization | — | 2D and 3D[4] |
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