Comparison ledger
GCA 3696, Leica , Vistec INS 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 3696GCA | , Vistec INS 3000Leica |
|---|---|---|
| OEM | GCA | Leica |
| Category | — | — |
| Wafer size | 150mm | 200mm |
| Process node | legacy semiconductor lithography equipment | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | g-line | — |
| Family | GCA 3696 | Leica , Vistec INS 3000 |
| Cited variants |
| — |
| Specifications | ||
| Instrument type | Photorepeater system[1] | — |
| Conversion note | Can be easily converted to function as a GCA 3696 Photorepeater system[1] | — |
| Exposure target | Photoresist-coated glass plates[1] | — |
| Maximum plate size | Up to 7"[1] | — |
| Wafer size | 3" up to 150mm; smaller pieces[1] | Single 150/200 mm wafer loadport[3] |
| Exposure wavelength | g-line (436nm)[1] | — |
| Numerical aperture | 0.30 N.A.[1] | — |
| Reduction | 5:1 reduction[1] | — |
| Field size | Variable field size up to 15mm square[1] | — |
| Minimum feature size | <0.9µm[1] | — |
| Registered alignment | Typically <0.25µm[1] | — |
| Mask size | 5" x 0.090"-thick masks[1] | — |
| Stage motion | Laser-controlled stage motion[1] | — |
| Type | Step-and-repeat camera (stepper)[2] | Optical defect review station[3] |
| Lens | Zeiss lens with 0.30 numerical aperture[1] | — |
| Resolution | 0.9 µm[1] | — |
| Reduction ratio | 5:1[1] | — |
| Control computer | DEC PDP-11/04[2] | — |
| Interface chassis | 9280 Interface Chassis[2] | — |
| Wafer loadport | — | Single 150/200 mm wafer loadport[3] |
| Lighting | — | Bright field light source; DIC DUV light source[3] |
| Camera | — | UV and DUV camera[3] |
| Optics | — | 6 optics: 150x, 100x, 50x, 25x, 10x, 5x[3] |
| Software | — | Viscon Software[3] |
| Data interface | — | KLARF input[3] |