Comparison ledger
Glenbrook RTX-113HV, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RTX-113HVGlenbrook | |
|---|---|---|
| OEM | Glenbrook | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Glenbrook RTX-113HV | KLA .204 PSL Wafer |
| Cited variants | — | |
| Specifications | ||
| Model | RTX-113HV MicroTech X-ray System[3] | — |
| Application | Inspection of multi-layer and assembled printed circuit boards with dense metal BGAs[4] | — |
| Operating Voltage | 120v/220v, 50-60hz[4] | — |
| Contrast Resolution | Can resolve .001 gold wire[4] | — |
| Spatial Resolution | 20 lp/mm (with MicroTechTM option, up to 100 lp/mm)[4] | — |
| Anode Voltage | 80 kV[4] | — |
| Anode Current | 150 microamps[4] | — |
| Focal Spot to Image Plane Distance | 4-6 inches[4] | — |
| XRTV Zoom Camera | 4X-50X magnification[4] | — |
| Focal Spot Size | 0.2mm[5] | — |
| X-ray Activation Mode | foot pedal or timer switch[5] | — |
| Dimensions | 50"H x 60"W x 33"D[5] | — |
| Configuration | — | NIST Traceable[6] |
| Wafer Size | — | 8 inch[7] |
| Traceability | — | NIST[8] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[6] |
| NIST Traceable | — | Yes[7] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[7] |
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