Comparison ledger
Hitachi Regulus8100, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Regulus8100Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi Regulus8100 | KLA .204 PSL Wafer |
| Specifications | ||
| Tool designation | SEM-Hitachi-Regulus8100[1] | — |
| Tool type | Scanning electron microscope (SEM)[1] | — |
| Manufacturer / OEM | Hitachi[1] | — |
| Designation as listed | SEM-Hitachi-Regulus8100[1] | — |
| Facility classification | METROLOGY[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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