Comparison ledger
Hitachi S 3200 N, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 3200 NHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 3200 N | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Two Vacuum Pumps[1] | NIST Traceable[3] |
| Res | 5.9 KeV[1] | — |
| Tool type | Scanning electron microscope (SEM)[1] | — |
| Detector | BSE Robinson Detector[2] | — |
| Imaging software | DIPS software and DISS 5 acquisition software[2] | — |
| EDX software | INCA software[2] | — |
| Accessories listed | Two vacuum pumps[1] | — |
| Manual covers | SEM starting procedure, imaging, and EDX procedure[2] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[4] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[4] |
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