Comparison ledger
Hitachi TM 3030 Tabletop, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | TM 3030 TabletopHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | 2013– | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi TM 3030 Tabletop | KLA .204 PSL Wafer |
| Cited variants | — | |
| Specifications | ||
| Voltage | 100 - 240 V, 50 / 60 Hz[2] | — |
| Power | 500 VA, 1 Phase[2] | — |
| Accelerating voltage | 5 kV, 15 kV[3] | — |
| Magnification | 15x to 30,000x (with digital zoom 2x, 4x)[3] | — |
| Maximum specimen diameter | 70 mm[3] | — |
| Maximum specimen thickness | 50 mm[3] | — |
| Stage movement | X = 35 mm, Y = 35 mm[3] | — |
| Dimensions (main unit, manual stage) | 330 mm (W) × 606 mm (D) × 565 mm (H)[3] | — |
| Weight (main unit, manual stage) | 63 kg[3] | — |
| Weight (diaphragm pump) | 4.5 kg[3] | — |
| Power supply | 100–240 V, 50/60 Hz, 500 VA[2] | — |
| Detector | High-sensitivity backscattered electron detector (4-segment)[1] | — |
| Observation modes | Standard, Charge-up reduction[1] | — |
| Starting time | 3 minutes[1] | — |
| Operating system | Windows 7 Professional (32/64 bit)[3] | — |
| Magnification Range | 15x - 30,000x (with digital zoom 2x, 4x)[3] | — |
| Maximum Specimen Size | 70 mm diameter, 50 mm thickness[3] | — |
| Electron Gun | Pre-centered cartridge filament[1] | — |
| Detector Type | High-sensitivity 4-segment backscattered electron detector[1] | — |
| Vacuum System | Turbo molecular pump 30 L/s, diaphragm pump 1 m³/h[1] | — |
| Power Supply | AC 100-240 V, 500 VA, 50/60 Hz[2] | — |
| Dimensions (Main Unit) | 330(W) × 606(D) × 565(H) mm[3] | — |
| Weight (Main Unit) | 63 kg (manual stage)[3] | — |
| Operating System | Windows 7 Professional[3] | — |
| Image Data Recording Pixels | 1280×960 pixels (max.) / 640×480 pixels[1] | — |
| Image Format | BMP, TIFF, JPEG[1] | — |
| Manufacturer | Hitachi[2] | — |
| Model | TM 3030 Tabletop[2] | — |
| Equipment type | Tabletop microscope[2] | — |
| Electron microscope type | SEM[3] | — |
| Sample size | Up to 70 mm in diameter and 50 mm thickness[3] | — |
| EDX integration | Integrable with an EDX unit[3] | — |
| EDX optional packages | SwiftED3000 or Quantax70[3] | — |
| Configuration | — | NIST Traceable[4] |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[4] |
| NIST Traceable | — | Yes[4] |
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