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Hitachi

TM 3030 Tabletop

Metrology & InspectionProduced 2013–Hitachi TM 3030 Tabletop family
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TM 3030 Tabletop — Inventory photo
Fig. 01TM 3030 TabletopInventory photo[2]

Produced

2013–

Power

100 - 240 V, 50 / 60 Hz[2]

Vacuum

4.5 kg[3]

Optics

15x to 30,000x (with digital zoom 2x, 4x)[3]

What it is

The Hitachi TM 3030 Tabletop is a tabletop scanning electron microscope for metrology and inspection.[2][3]

The TM 3030 is a compact electron microscope intended for desktop use in a laboratory setting.[1][3]

How it works

The TM 3030 uses low-vacuum scanning electron microscopy to observe secondary electron images of surface morphology and backscattered electron images of compositional contrast.[1]

The TM 3030 can observe non-conductive samples without prior coating or other sample preparation in its low-vacuum observation mode.[1]

Where it fits in the process flow

The TM 3030 sits in the inspection and characterization stage of a workflow, after a specimen is mounted on the stage and before image review or elemental analysis.[1]

The TM 3030 supports direct observation of samples that would otherwise require vapor deposition in conventional SEM practice.[1]

Applications

The TM 3030 is used for surface morphology inspection, compositional imaging, and elemental analysis.[1]

The TM 3030 is suitable for non-conductive specimens and for samples that are prone to charge-up under electron-beam observation.[1]

What do the numbers mean?

Power & electrical4

Voltage
100 - 240 V, 50 / 60 Hz[2]
Accurate?
Accelerating voltage
5 kV, 15 kV[3]
Accurate?
Power supply
100–240 V, 50/60 Hz, 500 VA[2]
Accurate?
Power Supply
AC 100-240 V, 500 VA, 50/60 Hz[2]
Accurate?

Vacuum & pumping2

Weight (diaphragm pump)
4.5 kg[3]
Accurate?
Vacuum System
Turbo molecular pump 30 L/s, diaphragm pump 1 m³/h[1]
Accurate?

Optics & imaging5

Magnification
15x to 30,000x (with digital zoom 2x, 4x)[3]
Accurate?
Detector
High-sensitivity backscattered electron detector (4-segment)[1]
Accurate?
Magnification Range
15x - 30,000x (with digital zoom 2x, 4x)[3]
Accurate?
Detector Type
High-sensitivity 4-segment backscattered electron detector[1]
Accurate?
Magnification
15x ~ 30,000x with digital zoom at 2x and 4x[3]
Accurate?

Control & software3

Operating system
Windows 7 Professional (32/64 bit)[3]
Accurate?
Operating System
Windows 7 Professional[3]
Accurate?
Operating system
Windows 7 Professional (32/64 bit version)[3]
Accurate?

Dimensions & facilities4

Dimensions (main unit, manual stage)
330 mm (W) × 606 mm (D) × 565 mm (H)[3]
Accurate?
Weight (main unit, manual stage)
63 kg[3]
Accurate?
Dimensions (Main Unit)
330(W) × 606(D) × 565(H) mm[3]
Accurate?
Weight (Main Unit)
63 kg (manual stage)[3]
Accurate?

Configuration & options17

Power
500 VA, 1 Phase[2]
Accurate?
Maximum specimen diameter
70 mm[3]
Accurate?
Maximum specimen thickness
50 mm[3]
Accurate?
Stage movement
X = 35 mm, Y = 35 mm[3]
Accurate?
Observation modes
Standard, Charge-up reduction[1]
Accurate?
Starting time
3 minutes[1]
Accurate?
Maximum Specimen Size
70 mm diameter, 50 mm thickness[3]
Accurate?
Electron Gun
Pre-centered cartridge filament[1]
Accurate?
Image Data Recording Pixels
1280×960 pixels (max.) / 640×480 pixels[1]
Accurate?
Image Format
BMP, TIFF, JPEG[1]
Accurate?
Manufacturer
Hitachi[2]
Accurate?
Model
TM 3030 Tabletop[2]
Accurate?
Equipment type
Tabletop microscope[2]
Accurate?
Electron microscope type
SEM[3]
Accurate?
Sample size
Up to 70 mm in diameter and 50 mm thickness[3]
Accurate?
EDX integration
Integrable with an EDX unit[3]
Accurate?
EDX optional packages
SwiftED3000 or Quantax70[3]
Accurate?

Observed configurations

How individual machines were equipped when they appeared on the secondary market — as listed, per unit. These describe one specific machine, not the model in general.

Unit as listed[2]

  • Bruker Scan Generator

Vintage & configurations

  1. 2013-05Production start[1]

    Hitachi TM3030 tabletop SEM released

  2. 2014-08Production start[1]

    TM3030Plus released in August 2014.

Documented models & variants

DesignationGenerationVintageChangesSource
TM3030Plus—2014Added low-vacuum secondary electron detector; magnification increased to 60,000×unicam.hu[1]
TM3030—2013Released in May 2013; improved image resolution and higher-resolution surface mode are stated for this variant.unicam.hu[1]
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage100 - 240 V, 50 / 60 Hz[2]
  • Accelerating voltage5 kV, 15 kV[3]
  • Weight (diaphragm pump)4.5 kg[3]
  • Power supply100–240 V, 50/60 Hz, 500 VA[2]
  • Vacuum SystemTurbo molecular pump 30 L/s, diaphragm pump 1 m³/h[1]
  • Power SupplyAC 100-240 V, 500 VA, 50/60 Hz[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What accelerating voltages are specified for the TM 3030?

The TM 3030 is specified with accelerating voltages of 5 kV and 15 kV.[3]

What sample size can the TM 3030 accept?

The TM 3030 accepts samples up to 70 mm in diameter and 50 mm in thickness.[3][1]

Not publicly documented

The following facts about the TM 3030 Tabletop are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • The control-system platform and OS era of the TM 3030 Tabletop are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TM 3030 Tabletop are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TM 3030 Tabletop is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the TM 3030 Tabletop are on record.

    Answerable by: an OEM parts catalog or a service engineer

  • No publicly hosted manuals, SOPs, or datasheets for the TM 3030 Tabletop are on record.

    Answerable by: university cleanroom staff or an OEM application specialist

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]unicam.hu — unicam.huunicam.hu
  2. [2]Inventory photo
  3. [3]labwrench.com — labwrench.comlabwrench.com
  4. [4]Equipment inventory listing
  5. [5]HITACHI TM3030 PLUS INSTRUCTION MANUAL Pdf Download | ManualsLib — manualslib.commanualslib.com
  6. [6]https://journals.plos.org/plosgenetics/article/file?id=10.1371/journal.pgen.1006851&type=printable — journals.plos.orgjournals.plos.org
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Last updated Oct 6, 2026.

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