Comparison ledger
Keyence VHX-7000, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VHX-7000Keyence | |
|---|---|---|
| OEM | Keyence | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 8-inch wafers | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 End of life | — |
| Control system | — | — |
| Generation | — | — |
| Family | Keyence VHX-7000 | KLA .204 PSL Wafer |
| Specifications | ||
| Product type | Digital microscope[1] | — |
| Magnification | 20× to 2500×[1] | — |
| Illumination modes | Brightfield and darkfield[1] | — |
| Stage type | Fully motorised 300 mm XY stage[1] | — |
| Focusing | Automatic[1] | — |
| Image acquisition | High-resolution[1] | — |
| Magnification range | 20× to 2500×[1] | — |
| Illumination | Brightfield and darkfield illumination[1] | — |
| Stage | Fully motorised 300 mm XY stage[1] | — |
| Imaging | High-resolution image acquisition[1] | — |
| Image stitching | Image stitching for large samples[1] | — |
| Depth imaging | Extended depth-of-field imaging[1] | — |
| Measurements | 2D measurements: distance, angle, area[1] | — |
| 3D capability | 3D surface reconstruction[1] | — |
| Documentation | Image comparison and documentation[1] | — |
| Wafer size | Up to 8-inch wafers[1] | — |
| Resolution | 4K resolution[2] | — |
| Depth-of-field | 20x greater depth-of-field[2] | — |
| Automation | Fully automatic XYZ system[2] | — |
| System type | Fully-automated digital microscope system[4] | — |
| Type | Fully motorised digital microscope[1] | — |
| Inspection sample size | Up to 8-inch wafers[1] | — |
| XY stage | Fully motorised 300 mm XY stage[1] | — |
| 3D functions | 3D surface reconstruction[1] | — |
| Model status | This model has been discontinued[5] | — |
| Camera image sensor option 1 | 1/1.8 inch, 3.19 megapixel CMOS image sensor[5] | — |
| Camera image sensor option 2 | 1/1.7-inch, 12.22-megapixel CMOS image sensor[5] | — |
| Storage capacity | 1 TB[5] | — |
| Power supply | 100 to 240 VAC ±10%, 50/60 Hz[5] | — |
| Power consumption | 430 VA[5] | — |
| Configuration | — | NIST Traceable[6] |
| Wafer Size | — | 8 inch[7] |
| Traceability | — | NIST[8] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[6] |
| NIST Traceable | — | Yes[7] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[7] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →