Keyence
VHX-7000
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Keyence VHX-7000 is a fully motorised digital microscope for high-resolution inspection of samples up to 8-inch wafers. The Keyence VHX-7000 offers magnification from 20× to 2500× with brightfield and darkfield illumination. The Keyence VHX-7000 features a fully motorised 300 mm XY stage and automatic focusing.[1]
Plate 01Digital Microscope | KEYENCE VHX-7000
KEYENCE CORPORATIONWatch on YouTubePlate 02VHX-7000 changes lenses.
chipsID - What's Inside?Watch on YouTubePlate 03Keyence VHX-7000 Digital Microscope
AmeriCOM-American Center for Optics ManufacturingWatch on YouTube
Where it fits in the process flow
The Keyence VHX-7000 is used in metrology and inspection contexts for process monitoring, defect analysis, and documentation of fabricated devices. The Keyence VHX-7000 is designed for inspection of samples up to 8-inch wafers in the EPFL configuration. The Keyence VHX-7000 is also grouped under optical microscopy and imaging within a nanolab metrology capability set.[1][6]
What do the numbers mean?
Power & electrical1
Wafer handling2
Optics & imaging11
Dimensions & facilities2
Configuration & options17
Vintage & configurations
- 2026End of life[2]
The VHX-7000 model page states that the model has been discontinued.
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Power supply100 to 240 VAC ±10%, 50/60 Hz[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of equipment is the Keyence VHX-7000?
The Keyence VHX-7000 is a digital microscope designed for high-resolution inspection.[1][2]
What sample size does the Keyence VHX-7000 support?
The Keyence VHX-7000 is designed for inspection of samples up to 8-inch wafers.[1]
Is the VHX-7000 still a current model?
The VHX-7000 model has been discontinued.[2]
Not publicly documented
The following facts about the VHX-7000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the VHX-7000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the VHX-7000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VHX-7000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VHX-7000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the VHX-7000 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
- [2]keyence.com — keyence.comkeyence.com
- [3]keyence.comkeyence.com
- [4]keyence.eukeyence.eu
- [5]ami.ua.eduami.ua.edu
- [6]Metrology — nanolab.berkeley.edunanolab.berkeley.edu
Last updated Oct 18, 2026.
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