Comparison ledger
KLA 0035235-003 MMD Head, KLA Surfscan 6200 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA Surfscan 6200 |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | Refurbished[2] |
| Model | 0035235-003[1] | Surfscan 6200[2] |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Manufacturer | — | KLA[2] |
| Wafer sizes | — | 8 inch[2] |
| Defect detection method | — | laser beam scanning[3] |
| Output displays | — | color-coded wafer maps, histograms, and summaries[3] |
| Detection capability | — | down to 0.157 µm at a 95% capture rate and down to 0.09 µm at an 80% capture rate[3] |
| Substrate sizes | — | 50mm (2 in), 76mm (3 in), 100mm (4 in), 125mm (5 in), 150mm (6 in), 200mm (8 in)[4] |
| Substrate material | — | silicon or any opaque, polished surface which scatters less than 5% of incident light[4] |
| Defect sensitivity | — | 0.10 µm diameter PSL sphere equivalent with greater than 90% capture rate[4] |
| Haze sensitivity | — | 0.02 ppm[4] |
| Haze resolution | — | 0.002 ppm[4] |
| Repeatability | — | 0.5% at 1σ[4] |
| Accuracy | — | ≥99%[4] |
| Dynamic range | — | 0.01 µm to 9,999 µm in a single measurement[4] |
| Illumination source | — | 30 mW Argon-Ion laser, 488 nm wavelength[4] |
| Control system | — | Microsoft Windows[3] |
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