KLA
Surfscan 6200 Particle Defect
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
How it works
The Surfscan 6200 class tool scans a wafer with a laser beam, collects scattered light through an optical system, and uses that signal to locate, size, and count surface defects.[4][7]
The Surfscan 6200 displays scan output as color-coded wafer maps, histograms, and summaries, which supports review of defect distributions across the wafer.[4][7]
The Surfscan 6200 accepts wafers in cassettes and can use manual or mechanical wafer alignment before scan execution.[4][7]
Applications
The Surfscan 6200 is used for particle defect inspection, surface contamination analysis, and haze measurement on semiconductor wafers and other polished substrates.[5][4][7]
The Surfscan 6200 has been used in defect measurements on coatings deposited by planar magnetron sputtering.[8]
What do the numbers mean?
Wafer handling4
Optics & imaging3
Performance2
Control & software1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Surfscan 6200 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6200 Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6200 Particle Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6200 Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6200 Particle Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6200 Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [5]semistarcorp.com — semistarcorp.comsemistarcorp.com
- [6]Surfscan 6200 Particle Defect — KLA | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [7]https://wiki.nanofab.ucsb.edu/w/images/2/27/Surfscan-Surfscan_6200_info.pdf — wiki.nanofab.ucsb.eduwiki.nanofab.ucsb.edu
- [8]Defects in Coatings Deposited by Planar Magnetron Sputtering: Measurements with a Tencor Surfscan 6200 — doi.orgdoi.org
- [9]Equipment inventory listing
Last updated Oct 13, 2026.
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