Comparison ledger
KLA 1007, KLA Profilm 3D Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | KLA Profilm |
| Cited variants | — |
|
| Specifications | ||
| Manufacturer | KLA[2] | — |
| Model | 1007[2] | — |
| Description | Wafer Prober[2] | — |
| Wafer size | 150 mm[2] | — |
| Convertible to 8 inch wafer size | Yes[2] | — |
| Vintage | 01.06.1995[2] | — |
| Make | KLA[3] | — |
| Equipment type | Prober[3] | — |
| Objective | — | 100x[4] |
| Product family | — | Filmetrics Profilm3D optical profilometer[1] |
| Measurement type | — | Non-contact 3D surface topography measurement[1] |
| Measurement techniques | — | White light interferometry (WLI) and phase shifting interferometry (PSI)[1] |
| Objective lens range | — | 5X to 100X[1] |
| Wafer stage support | — | Manual R-theta wafer stage supporting 50mm to 200mm diameter wafers[1] |
| X-Y stage travel | — | 100mm x 100mm travel[5] |
| Z stage range | — | 100mm[5] |
| Piezo travel | — | 500μm[5] |
| Sample max weight | — | 2.5kg[5] |
| Camera | — | 2592 x 1944 (5MP)[5] |
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