Comparison ledger
KLA 1007, SCREEN SU 3200 Single Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | |
|---|---|---|
| OEM | KLA | SCREEN |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | SCREEN SU 3200 |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 12 inch (300 mm)[3] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Configuration | — | 12 Chamber Aquaspin[3] |
| Factory Interface | — | FOUP (4)[3] |
| Handler System | — | Kawasaki[3] |
| Software Version | — | Standard[3] |
| CIM | — | SECS / GEMS[3] |
| Process | — | SOM / SPM / SC1/ SC2 / 03W / DHF[3] |
| Software version | — | P2485STD00V2485STD00[4] |
| System power rating | — | 208AC-3 Phase[4] |
| Maximum chambers | — | 12 chambers in four three-level towers[5] |
| Throughput | — | up to 800 wafers per hour (WPH)[5] |
| Chemical supply options | — | dynamic direct injection (DDI) or cabinet-type chemical supply system[5] |
| Chamber volume reduction | — | about one-third of the previous model[5] |
| Processes | — | SOM / SPM / SC1/ SC2 / 03W / DHF[3] |
| Power rating | — | 208AC-3 Phase[4] |
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