Comparison ledger
KLA 1007, Thermawave Opti-Probe 2600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Opti-Probe 2600Thermawave |
|---|---|---|
| OEM | KLA | Thermawave |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | — |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | KLA[2] | — |
| Model | 1007[2] | — |
| Description | Wafer Prober[2] | — |
| Wafer size | 150 mm[2] | — |
| Convertible to 8 inch wafer size | Yes[2] | — |
| Vintage | 01.06.1995[2] | — |
| Make | KLA[3] | — |
| Equipment type | Prober[3] | — |
| Wafer Size Compatibility | — | 4- to 8-inches[4] |
| Laser | — | 675nm thermoelectrically cooled diode laser[4] |
| Spectrometry lamp | — | 450 to 840 nm tungsten halogen lamp[4] |
| BPR range | — | thick dielectric films > 500A[4] |
| BPE range | — | thin dielectric films < 500A[4] |
| Resolution | — | 150nm[4] |
| Product type | — | Thin Film Measurement System[5] |
| Version | — | 200[5] |
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