Comparison ledger
KLA 1007, Tokyo Electron P 8 Automatic Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | P 8 Automatic WaferTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1996 Vintage · 2002 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron P 8 Automatic Wafer |
| Specifications | ||
| Manufacturer | KLA[1] | Tokyo Electron[3] |
| Model | 1007[1] | P 8[3] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 6-inch and 8-inch wafers (150 mm / 200 mm)[4] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | Tel[3] |
| Equipment type | Prober[2] | — |
| Type | — | Automatic wafer prober[3] |
| Wafer loading | — | Automatic with cassette-to-cassette handler[4] |
| Alignment system | — | Optical + mechanical alignment (microscope + camera)[4] |
| Chuck type | — | Ambient, hot chuck, triaxial (optional)[4] |
| ATE compatibility | — | Advantest, Teradyne, others[4] |
| Control system | — | TEL GUI / Loader controller[4] |
| Probe card support | — | Vertical, cantilever (custom fixtures available)[4] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →