Waferpedia

Tokyo Electron

P 8 Automatic Wafer

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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Tokyo Electron P 8 Automatic Wafer is an automatic wafer prober. Tokyo Electron P 8 Automatic Wafer is designed for 6-inch and 8-inch wafers. Tokyo Electron P 8 Automatic Wafer is used for production-level wafer sort testing.[1][2]

P 8 Automatic Wafer — Inventory photo
Fig. 01P 8 Automatic WaferInventory photo[3]

What it is

General reference — not yet source-verified

The Tokyo Electron P 8 Automatic Wafer is a test and probe tool. Wafer probers are semiconductor test platforms that bring probe needles or a probe card into electrical contact with pads on each die across a wafer so the die can be measured before singulation and packaging.

How it works

General reference — not yet source-verified

Wafer probers generally load a wafer onto a chuck, align wafer features to a coordinate system, step the wafer so each die reaches the test position, and make temporary electrical contact through a probe interface connected to automated test equipment. Wafer probers generally rely on motion control, optical viewing, wafer handling, and contact force control to repeat measurements across the wafer.

Where it fits in the process flow

General reference — not yet source-verified

Wafer probing sits after wafer fabrication and before dicing, assembly, and final package test. Wafer probers are used at the wafer sort stage to screen dies, collect electrical data, and support yield learning before downstream packaging commits additional work to each die.

Applications

General reference — not yet source-verified

Wafer probers are used for electrical characterization and production screening of integrated circuits while the devices are still in wafer form. Wafer probers can support process monitoring, engineering evaluation, fault isolation, and qualification work when paired with suitable probe cards and test instrumentation.

What do the numbers mean?

Wafer handling5

Type
Automatic wafer prober[1]
Accurate?
Wafer size
6-inch and 8-inch wafers (150 mm / 200 mm)[2]2 sources
Accurate?
Wafer loading
Automatic with cassette-to-cassette handler[2]2 sources
Accurate?
Chuck type
Ambient, hot chuck, triaxial (optional)[2]2 sources
Accurate?
Control system
TEL GUI / Loader controller[2]2 sources
Accurate?

Optics & imaging1

Alignment system
Optical + mechanical alignment (microscope + camera)[2]2 sources
Accurate?

Configuration & options5

Model
P 8[1]
Accurate?
Make
Tel[1]
Accurate?
Manufacturer
Tokyo Electron[1]
Accurate?
ATE compatibility
Advantest, Teradyne, others[2]
Accurate?
Probe card support
Vertical, cantilever (custom fixtures available)[2]2 sources
Accurate?

Vintage & configurations

  1. 1996Vintage[4]

    The equipment is described as 1996 vintage.

  2. 2002Vintage[3]

    The equipment is described as 2002 vintage.

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of tool is the Tokyo Electron P 8 Automatic Wafer?

The Tokyo Electron P 8 Automatic Wafer is an automatic wafer prober.[1][2]

What wafer sizes does the Tokyo Electron P 8 Automatic Wafer support?

The Tokyo Electron P 8 Automatic Wafer is designed for 6-inch and 8-inch wafers.[1][2]

How are wafers loaded on the Tokyo Electron P 8 Automatic Wafer?

The Tokyo Electron P 8 Automatic Wafer uses automatic cassette-to-cassette wafer handling.[1][2]

What alignment method does the Tokyo Electron P 8 Automatic Wafer use?

The Tokyo Electron P 8 Automatic Wafer uses optical and mechanical alignment with a microscope and camera.[1][2]

Not publicly documented

The following facts about the P 8 Automatic Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented variants, configuration options, or revision breakpoints of the P 8 Automatic Wafer are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the P 8 Automatic Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the P 8 Automatic Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the P 8 Automatic Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the P 8 Automatic Wafer are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]junr.com.cn — junr.com.cnjunr.com.cn
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
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Last updated Oct 16, 2026.

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