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Comparison ledger

1007versusFPP 5000 Four Point

KLA 1007, Veeco FPP 5000 Four Point, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLAVeeco
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Veeco FPP 5000 Four Point
Specifications
ManufacturerKLA[1]Veeco[3]
Model1007[1]FPP 5000 Four Point[3]
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]Test & Probe[4]
Configuration—With various types of holders[3]
Tool description—four point probe with various types of holders[4]
Test unit designation—VEECO FPP-5000 4-Point Probe test unit[5]
Measured items—resistive properties of semiconductor wafers and resistive films[6]
Measurement modes—V/I, SHEET, SLICE, THICK, TYPE, PEN[5]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]aggiefab.tamu.eduaggiefab.tamu.edu
  6. [6]jmind.comjmind.com