Veeco
FPP 5000 Four Point
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Veeco FPP 5000 is a four-point probe instrument used for measuring resistive properties of semiconductor wafers and resistive films.[4]
The FPP 5000 is a four-point probe with various types of holders.[1][2][5]
The electronics and probing mechanism of the FPP 5000 are contained in a single compact package with a rugged cast aluminum housing.[4]
How it works
The FPP 5000 has a constant-force probe head that is rigidly fixed in the housing.[4]
In the FPP 5000, the sample is moved into the probe head rather than the probe head moving into the sample, which keeps probe force constant regardless of operator force or wafer thickness.[4]
The instrument provides four measurement modes labeled V/I, SHEET, SLICE, and THICK.[3][6]
The V/I mode displays measured V/I resistance multiplied by a programmed geometry correction factor and reports resistance in ohms.[3]
The SHEET mode displays sheet resistance based on measured V/I and reports sheet resistivity in ohms per square.[3]
The SLICE mode calculates the bulk resistivity of a slice or layer whose thickness is entered in program mode, reporting slice resistivity in ohm-centimeters.[3]
The THICK mode calculates the thickness of a layer whose bulk resistivity is entered in program mode, reporting thickness in mil, micron, or angstrom units.[3]
A TYPE measurement returns P or N to indicate p-type or n-type material, with invalid or questionable tests indicated by both P and N being lit.[3]
A PEN mode applies a penetrate voltage pulse before testing to reduce contact resistance.[3]
Where it fits in the process flow
Applications
The FPP 5000 simplifies the measurement of resistive properties of semiconductor wafers and resistive films.[4]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- high voltage
- probe head can easily be damaged
- users are not allowed to adjust the platen height or clean the probe-head
What do the numbers mean?
Wafer handling1
Configuration & options7
- With various types of holders[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What measurement modes does the Veeco FPP 5000 provide?
The FPP 5000 offers V/I, SHEET, SLICE, and THICK measurement modes, plus TYPE and PEN functions.[3][6]
How does the FPP 5000 ensure constant probe force?
The FPP 5000 is designed so that the wafer is moved into the probe head, which is rigidly fixed in the housing; this ensures constant probe force independent of operator force and wafer thickness.[4]
What does the SHEET mode measure?
The SHEET mode displays sheet resistance based on measured V/I and reports sheet resistivity in ohms per square.[3]
What does the TYPE measurement do?
The TYPE measurement performs a type test and returns P or N for p-type or n-type material respectively; invalid or questionable tests are indicated by both P and N being lit.[3]
What does the PEN mode do?
The PEN mode applies a penetrate voltage pulse of 170 V for 4 milliseconds through a 10-megohm resistance before the test to reduce contact resistance.[3]
Not publicly documented
The following facts about the FPP 5000 Four Point are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPP 5000 Four Point are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the FPP 5000 Four Point are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the FPP 5000 Four Point are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the FPP 5000 Four Point is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FPP 5000 Four Point are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (7)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
- [3]aggiefab.tamu.edu — aggiefab.tamu.eduaggiefab.tamu.edu
- [4]jmind.com — jmind.comjmind.com
- [5]Veeco FPP 5000 Four Point family | Waferpedia — waferpedia.comwaferpedia.com
- [6]https://aggiefab.tamu.edu/wp-content/uploads/2021/02/Equipment-Spec_Veeco-FPP-5000-Four-Point-Probe.pdf — aggiefab.tamu.eduaggiefab.tamu.edu
- [7]MNTC - Equipment and Facilities | Service Centers — louisville.edulouisville.edu
Last updated Oct 13, 2026.
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