Comparison ledger
KLA 200 and KLA 2132, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 200KLA | 2132KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 200 | KLA 2132 |
| Specifications | ||
| Supported equipment family | KLA 200 series pattern inspection stations[1] | — |
| Related supported equipment | KLA Tencor 300 Series Pattern Inspection Stations, STARlight tools, and URSA tools[1] | — |
| Data hub function | 9X Fileservers are central data hubs serving KLA Tencor reticle inspection equipment[1] | — |
| Software function | 9X System Software supports storage and retrieval of setup and result files and several analysis functions[1] | — |
| Product type | — | Wafer inspection system[2] |
| Relationship to KLA 2135 | — | Earlier model than the KLA 2135[2] |
| Wafer size (primary) | — | 200mm (8")[3] |
| Wafer size (alternate) | — | 4", 5", 6" capable[3] |
| Throughput | — | 2–8 wafers per hour[3] |
| Sensitivity | — | >0.25 µm pixels[3] |
| Inspection type | — | Patterned wafer defect inspection[3] |
| Optics | — | Brightfield, small-pixel, high data rate digital image processing[2] |
| User interface | — | DOS operating system[4] |
| SAT capability | — | Segmented Auto Threshold (SAT) included[3] |
| Calibration wafer | — | 8" DSW calibration wafer included[3] |
| Vintage (year of introduction) | — | 1995[3] |
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