Comparison ledger
KLA 200 and KLA 2367, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 200KLA | 2367KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Only one wafer size at a time |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 200 | KLA 2367 |
| Specifications | ||
| Supported equipment family | KLA 200 series pattern inspection stations[1] | — |
| Related supported equipment | KLA Tencor 300 Series Pattern Inspection Stations, STARlight tools, and URSA tools[1] | — |
| Data hub function | 9X Fileservers are central data hubs serving KLA Tencor reticle inspection equipment[1] | — |
| Software function | 9X System Software supports storage and retrieval of setup and result files and several analysis functions[1] | — |
| SW Version | — | 10.4.507[2] |
| Wafer size | — | Only one wafer size at a time[2] |
| 300 mm (12") | — | Yaskawa + Asyst ISO Port or[2] |
| Configuration | — | Shinko LP[2] |
| 200 mm (8") | — | Yaskawa + Asyst Versa Port (SMIF)[2] |
| GL | — | G Line[2] |
| IL | — | I Line[2] |
| VIS | — | Visible[2] |
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