Comparison ledger
KLA 200 and KLA Candela CS 20 V, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 200KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 200 | KLA Candela CS 20 |
| Specifications | ||
| Supported equipment family | KLA 200 series pattern inspection stations[1] | — |
| Related supported equipment | KLA Tencor 300 Series Pattern Inspection Stations, STARlight tools, and URSA tools[1] | — |
| Data hub function | 9X Fileservers are central data hubs serving KLA Tencor reticle inspection equipment[1] | — |
| Software function | 9X System Software supports storage and retrieval of setup and result files and several analysis functions[1] | — |
| Voltage | — | 230 VAC[2] |
| Configuration | — | 50/60 Hz[2] |
| Phase | — | 3 Phase[2] |
| Chuck | — | 2-5"[3] |
| Wafer sizes | — | 4-inch and 6-inch[4] |
| Chuck sizes | — | 4-inch and 6-inch[4] |
| Software vs | — | Candela Wafer Version 6.8 Build 16[4] |
| Laser specs | — | 405 nm oblique-incidence laser and 660 nm normal-incidence laser[4] |
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