Waferpedia

KLA

Candela CS 20 V

Candela CS 20 V — Inventory photo
Fig. 01Candela CS 20 VInventory photo[1]

What is it?

KLA Candela CS 20 V is a metrology and inspection equipment model with source-stated wafer sizes of 4 inch and 6 inch.

What do the numbers mean?

Power & electrical3

Voltage
230 VAC[1]
Accurate?
50/60 Hz[1]
Accurate?
Phase
3 Phase[1]
Accurate?

Wafer handling4

Chuck
2-5"[2]
Accurate?
Wafer sizes
4-inch and 6-inch[3]
Accurate?
Chuck sizes
4-inch and 6-inch[3]
Accurate?
Software vs
Candela Wafer Version 6.8 Build 16[3]
Accurate?

Optics & imaging1

Laser specs
405 nm oblique-incidence laser and 660 nm normal-incidence laser[3]
Accurate?

Configuration & options1

Phase
1 Phase[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage230 VAC[1]
  • Configuration50/60 Hz[1]
  • Phase3 Phase[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Candela CS 20 V are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 20 V are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Candela CS 20 V are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Candela CS 20 V are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Candela CS 20 V are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Candela CS 20 V is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
  4. [4]Equipment inventory listing
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Last updated Jul 29, 2026.

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