KLA
Candela CS 20 V
What it is
General reference — not yet source-verifiedThe KLA Candela CS 20 V is a metrology and inspection tool used for wafer surface inspection. Wafer inspection systems in this class scan semiconductor wafers for surface defects and process-induced anomalies.
How it works
The KLA Candela CS 20 V can be configured with a 405 nm oblique-incidence laser and a 660 nm normal-incidence laser. The KLA Candela CS 20 V can be configured with Candela Wafer software version 6.8 Build 16.[3]
Where it fits in the process flow
General reference — not yet source-verifiedWafer surface inspection tools are used between fabrication steps to monitor process quality and detect excursions before later processing adds more value to the wafer. Wafer surface inspection tools are commonly placed around deposition, lithography, etch, clean, and polish sequences where surface defects can affect yield and downstream performance.
Applications
General reference — not yet source-verifiedMetrology and inspection tools in this class are used to find particles, scratches, haze, stains, and other surface defects on semiconductor wafers. Metrology and inspection tools in this class are also used for process monitoring, defect review workflows, and engineering evaluation of surface condition after key unit processes.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage230 VAC[1]
- Configuration50/60 Hz[1]
- Phase3 Phase[1]
- Power input (variant 1)230 VAC, 50/60 Hz, 3-phase[1]
- Power input (variant 2)50/60 Hz, 1-phase[2]
- Power voltage230 VAC[1]
- Power frequency50/60 Hz[1]
- Power phase (option 1)3 Phase[1]
- ModelCandela CS 20 V[1]
- Power230 VAC, 50/60 Hz, 3 Phase[1]
- Power50/60 Hz, 1 Phase[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Candela CS 20 V are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Candela CS 20 V are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Candela CS 20 V are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Candela CS 20 V are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Candela CS 20 V are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Candela CS 20 V is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]inventory listing
- [4]Equipment inventory listing
Last updated Oct 16, 2026.
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