Comparison ledger
KLA .204 PSL Wafer, KLA 2351, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2351KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Wafer Transfer System |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 2351 |
| Specifications | ||
| Configuration | NIST Traceable[1] | With HDD & Software[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Load Port Qty | — | 2[4] |
| Wavelength Illumination | — | 370~720 nm[4] |
| Wavelength Band | — | Visible, UV[4] |
| Pixel Size | — | 0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[4] |
| Array Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[4] |
| Array False Defect Rate | — | ≤1.5%(all sizes)[4] |
| Random Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[4] |
| Random False Defect Rate | — | ≤1.5% (all sizes)[4] |
| Repeatability | — | ≥90% (20 consecutive run on the same DSW wafer)[4] |
| Wafer size | — | Wafer Transfer System[4] |
| Wafer Sizes | — | 8 inch; 12 inch[5] |
| Pixel Sizes | — | 0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[4] |
| Vintage | — | 2002[4] |
| Illumination Wavelength | — | 370~720 nm[4] |
| Load Port Quantity | — | 2[4] |
| User Interface | — | Monitor, Workstation, Keyboard, Trackball, Joystick[4] |
| Main Body Components | — | Inspection Station, Wafer Transfer System, Stage[4] |
| Includes | — | HDD & Software, External Blower, Power Line Conditioner[4] |
| Make | — | KLA[4] |
| Model | — | 2351[4] |
| Main Body | — | Inspection Station; Wafer Transfer System; Stage[4] |
| OEM | — | KLA[4] |
| Category | — | Inspection System[4] |
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