Comparison ledger
KLA .204 PSL Wafer, KLA 6200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6200KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 25 Wafer Slot Cassette |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA 6200 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Scan Stage[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Wafer size | — | 25 Wafer Slot Cassette[4] |
| Process | — | Vac 23 InHg[4] |
| Inlet Power | — | 1 line of 208 Vac, 15 amp[4] |
| Voltage | — | 208 V[5] |
| Frequency | — | 60 Hz[5] |
| Cassette capacity | — | 25 wafer slots[4] |
| Process vacuum | — | 23 InHg[4] |
| Exhaust | — | Blower for laser cooling[4] |
| Power requirement | — | 208 Vac, 15 amp[4] |
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