KLA

6200

Metrology & Inspection 25 Wafer Slot Cassette KLA 6200 family

Research Quality: 20% complete

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6200 — Inventory photo — Fig. 016200Inventory photo^[1]

Plate 01KLA-Tencor Surfscan 6200 Defect Inspection System (ID# 4418)
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Wafer size

25 Wafer Slot Cassette

Power

1 line of 208 Vac, 15 amp^[1]

Vacuum

Exhaust with blower for laser cooling^[1]

What is it?

What do the numbers mean?

Power & electrical4

Inlet Power: 1 line of 208 Vac, 15 amp^[1]
Voltage: 208 V^[2]; Single Phase^[2]
Frequency: 60 Hz^[2]

Vacuum & pumping1

Exhaust with blower for laser cooling^[1]

Accurate?

Wafer handling4

Wafer size: 25 Wafer Slot Cassette^[1]
Wafer size: Wafer Transfer^[1]; Cassette Transfer^[1]; Boat Elevator / Robot Transfer^[1]

Configuration & options3

Scan Stage^[1]
Process: Vac 23 InHg^[1]; 17 A^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

ConfigurationExhaust with blower for laser cooling^[1]
Inlet Power1 line of 208 Vac, 15 amp^[1]
Voltage208 V^[2]
ConfigurationSingle Phase^[2]
Frequency60 Hz^[2]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

KLA Surfscan 6200 SBC UpgradeIn Productionsource^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the 6200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 6200 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 6200 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 6200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 6200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 6200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report